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ۼ : 14-01-24 18:02
[14.01] ö -Patternable Large-Scale Molybdenum Disulfide Atomic Layers Grown by Gold-Assisted Chemical Vapor Deposition
 ۾ :
ȸ : 1,499  

Patternable Large-Scale Molybdenum Disulfide Atomic Layers Grown by Gold-Assisted Chemical Vapor Deposition

- Intek Song, Chibeom Park, Misun Hong, Jaeyoon Baik, Hyun-Joon Shin, Hee Cheul Choi

Two-dimensional (2D) MoS2 has gained much attention for its intrinsically semiconducting property that lacks in graphene. As a consequence, there has been a rapid increase in the number of reports regarding large-scale synthesis of MoS2 by chemical vapor deposition (CVD). However, none of these has accomplished all of uniformity, scalability and patternability due to their intrinsic limit. A novel way to grow MoS2 in large scale with uniformity and in desired patterns is developed. We use Au film as a catalyst on which Mo(CO)6 vapor decomposes to form Mo-Au surface alloy that is an ideal Mo reservoir for the growth of atomic layers of MoS2. Upon exposure to H2S, this surface alloy becomes few-layer MoS2, which can be isolated and transferred on an arbitrary substrate. By simply patterning Au catalyst film by conventional lithographic techniques, MoS2 atomic layers in desired patterns are fabricated. This paper is highlighted as Highly Important Paper, of which importance is within the top 10 % of all Angew. Chem. Int. Ed. papers, and also selected as Inside Back Cover of Angew. Chem. Int. Ed. in January, 2014.

Ȳȭ굧 ׷ɿ ݵü Ư ϰ ־ ֱ ް ִ. ׿ ȭб ̿Ͽ ̸ ռϴ ֱ ð ִ. ׷ ̷ Ѱ Ȳȭ굧 β, ׸ ϴ · ռ . ̸ غϿ Ȳȭ굧 ϼ Ͽ. ڸ ˸ŷ Ͽ 굧ī - ǥ ձ Ͽµ, ǥ ձ β Ȳȭ굧 ϴµ ȴ. ǥ ձݿ ȲȭҸ ϸ Ȳȭ굧 ٲµ, ̸ ǥ鿡 иϿ ִ. ̶ ǥ ұ׷ǿ ϸ ׿ ϴ Ȳȭ굧 ׿ ߾ ϴ. ȰԹ ɹ 10 % ̳ شϴ Highly Important Paper Ǿ, 2014 1ȣ ǥ(inside back cover)ε Ǿ.


 
 

Total 73
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